xfrontiers Research Labs

MEMS, and nanomechanics for energy, and information technology applications

a) In-situ SEM tensile testing MEMS device, b) Nanoscale sample, c) Stress-strain diagram.

  • In-situ SEM nanomechanical characterization,
  • Elastic strain engineering,
  • Understanding, and tuning the material properties for energy and information technology applications.

Micro/nanofabrication, and MEMS for medical applications

  • Research and development of:

  1. novel unit processes,
  2. novel integration processes.

  • Scalable microfabrication of:

  1. High yield, MEMS devices for medical imaging applications.